E03700 - SEMI E37 - 高速SECSメッセージサービス（HSMS）汎用サービス StdTpc-Cluster Tools Polysilicon is float-zoned and a

Polysilicon is float-zoned and a sample from the zoned rod is analyzed following this Test Method to obtain impurity densities that can be related to the impurity content of the starting material

SEMI MF42-0316 (technical revision)

This test is intended to show the effect of corrosion caused when a corrosive gas such as HCl is contaminated by an oxidizer such as atmospheric moisture

the actual diameter of nominal 300 mm wafers may millimeters smaller

E03700 - SEMI E37 - 高速SECSメッセージサービス（HSMS）汎用サービス StdTpc-Cluster Tools Polysilicon is float-zoned and aSECSHSMS HSMSSEME4SECS IHSMSHSMSSEMIE4 SECS I HSMSOSITCP IPSEMI E13 SECS HSMS Subordinate Standards: SEMI E37. 1 0702 (Reapproved 0413) High Speed SECS Message Services Single Selected Session Mode (HSMS SS) SEMI E37. 2 95 (Withdrawn 1109) High Speed SECS Message Services General Session (HSMS GS) Referenced SEMI StandardsSEMI E4 Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS I) SEMI E5 Specification for SEMI